Lithography and Patterning Archives | Coventor
(a) Self-aligned double patterning (SADP) proce...
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(a) BF image, (b) the corresponding SADP and (c...
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(a) The scheme of SADP based on 193 nm immersio...
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Figure 4 from Optimization of SADP Process for ...
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How to use SADP
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Sadp Tool
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The following simplified example illustrates on...